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NWSPEC

SR30 Spectrometer for wafer testing

SR30 Spectrometer for wafer testing

SR30: High-Speed Spectrometer for Industrial Applications

Designed and developed specifically for industrial application customers. The SR30 delivers high-speed spectral output, high-speed sampling, and high-speed transmission with a stable structure and low drift characteristics that support large-scale industrial customized OEM applications.

Supporting cross-platform secondary development packages (SDK), customers can complete rapid development and application by using the provided function libraries. Ideal for wafer inspection, optical spectroscopy inspection, online high-speed spectroscopy inspection, film transmittance inspection, industrial integration inspection, and teaching and research applications.

Product Highlights

  • High-Speed Performance: Up to 10 MHz chromatogram output, 0.8 ms per frame sampling
  • High Sensitivity: 2600 V/(lx·s) with 1024 pixel Hamamatsu CMOS sensor
  • UV Response: 200 - 1100 nm spectral range with high-order diffraction suppression
  • Low Drift: Stable structure with automatic zeroing function for industrial reliability
  • Cost-Effective: High performance OEM solution for large-scale industrial deployment

Applications

Industrial Inspection

  • Wafer inspection for semiconductor quality control
  • Optical spectroscopy inspection for precision manufacturing
  • Online high-speed spectroscopy inspection for real-time monitoring
  • Film transmittance inspection for coating quality verification
  • Industrial integration inspection for automated production lines

Research & Development

  • Teaching and research applications in academic institutions
  • Cross-platform development with Windows, Android, Linux, Wince support
  • Rapid application development using provided SDK function libraries

Key Features

Performance

  • High sensitivity for precise spectral measurements
  • High-speed chromatogram output: up to 10 MHz for rapid data acquisition
  • Ultraviolet response: 200 - 1100 nm broad spectral coverage
  • High-speed sampling: up to 0.8 ms per frame for real-time applications
  • Low stray light: <0.1% for accurate measurements

Reliability

  • Low drift characteristic ensures long-term stability
  • Automatic zeroing function for maintenance-free operation
  • Stable structure designed for industrial environments
  • High cost-effectiveness for OEM large-scale deployment

Optical Resolution

Wavelength Range Wavelength Resolution (nm) 30 μm slit 40 μm slit 50 μm slit 60 μm slit 70 μm slit 100 μm slit 150 μm slit 200 μm slit
200-500 nm 0.32 0.80 1.00 1.10 1.20 1.40 2.10 3.00 4.00
350-950 nm 0.66 1.20 2.00 2.20 2.40 2.80 3.80 5.80 7.70
600-1100 nm 0.64 1.20 2.00 2.20 2.40 2.80 3.80 5.80 7.70

Technical Specifications

Spectral Specifications
Spectral Range 200-1100 nm
Spectral Resolution Maximum 0.32 nm
Optical Resolution Maximum 0.8 nm FWHM
Higher-Order Diffraction Add a high-order diffraction suppression filter
Stray Light <0.1%
Detector Specifications
Detector Model Hamamatsu CMOS linear array sensor
Spectral Detection Range 200-1100 nm
Pixel 1024 pixels
Pixel Size 25 × 500 μm
High Sensitivity 2600 V/(lx·s)
Fastest Speed 10 MHz
Optical Specifications
Optical Path F/4, symmetrical cross Czerny-Turner optical path
Focal Length 70 mm; 90 mm
Incident Slit Standard 70 μm (optional)
Optical Fiber SMA905 0.22 NA
Electrical Specifications
Signal-to-Noise Ratio 500:1
Linearity >99.8%
Integration Time 0.1 ms - 1 s
Dynamic Range 150,000
AD Converter No distortion 16-bit
Test Speed 1.8 ms + integration time
Communication Interface USB 2.0, RS232, RS485
Power Consumption 300 mA @ 5V DC
Cooling 16-pin expansion interface with external trigger function
Physical Specifications
Dimensions 128 × 72 × 40 mm (5.0 × 2.8 × 1.6 inches)
Weight 500 g (1.1 lb)
Mounting 3-direction standard installation holes
Operating Systems Windows, Android, Linux, Wince
Regular price $1,350.00 USD
Regular price Sale price $1,350.00 USD
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SR30 Spectrometer for wafer testing
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Frequently Asked Questions

How can I contact you?

Feel free to call us T+86 189-6516-4839
or email  sales@nwspec.com to:

• Place an order
• Ask for a quote
• Or if you have any other questions

You will always get a live person here at NWSPEC; never an automated system! 

We are open from 6:00AM - 7:00PM Eastern Time, Monday - Friday. 

Where can I find application notes?

If you have any questions regarding the application notes, or can't find the one you are looking for, please contact Sales at sales@nwspec.com



Do you have instructional manuals for your instruments to download?

Yes, we have instructional manuals for our instruments. They can be found on https://nwspec.com/pages/resource .

If you don't see the one you are looking for, please contact: sales@nwspec.com



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