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NWSPEC

Spectral Reflectance Film Thickness Measurement System

Spectral Reflectance Film Thickness Measurement System

Spectral Reflectance Technology

Precision Film Thickness Measurement

Non-Contact Nanometer to Micrometer Analysis

High-precision film thickness measurement based on advanced spectral reflectance technology. Enables accurate, non-contact measurement from 5 nm to 250 μm across semiconductors, photovoltaics, optical coatings, and biomedical applications. Direct replacement for Filmetrics F20 systems.

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0.1 nm Repeatability
5 nm Minimum
Thickness
250 μm Maximum
Thickness
200-1700 nm Spectral
Range
◈

Spectral Reflectance Technology

Non-destructive, non-contact measurement using interference patterns from reflected light. Covers nanometer to micrometer range with sub-nanometer precision. No sample preparation required, no contamination risk—ideal for sensitive semiconductor and biomedical applications.

2 nm Accuracy (or 0.2%)
0.5 mm Spot Size
50-300+ mm Sample Diameter

System Features

◆

High Precision

0.1 nm repeatability with 2 nm accuracy. Whichever-is-greater algorithm ensures reliable measurements across entire thickness range.

◆

Non-Contact Measurement

No physical probe contact eliminates sample damage risk. Safe for delicate photoresists, organic films, and biological coatings.

◆

Wide Material Compatibility

Photoresists, oxides, silicon, semiconductors, organic films, transparent conductive films (ITO), metals, and polymers.

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Rapid Measurement

Fast spectral acquisition and analysis. Real-time thickness mapping for production environments and R&D applications.

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Easy Operation

Intuitive software interface with automated analysis. Minimal training required for production operators and researchers.

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High Adaptability

Configurable for wafers, glass panels, flexible substrates. Optional extended spectral range (200-1700 nm) for specialized materials.

Applications

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Photovoltaic Film Analysis

Silicon wafer thickness, anti-reflection coatings, transparent conductive oxide (TCO) layers for solar cell manufacturing.

◆

Semiconductor Films

Photomask resists, process films, dielectric materials (SiO₂, Si₃N₄), epitaxial layers, and CMP pad monitoring.

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Display Technology

OLED stack characterization, glass substrate thickness, ITO pattern verification, liquid crystal cell gap measurement.

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Optical Coatings

Hard coating thickness (AR, HR coatings), multi-layer stack analysis, filter characterization, lens coatings.

◆

Polymer Films

Polyimide (PI), polycarbonate (PC), PET, photoresists, and other high molecular weight organic films.

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Metal Films

Thin metal layer thickness for electrodes, interconnects, reflective coatings, and barrier layers.

Technical Specifications

Parameter Specification
Spectral Range 200 ~ 1700 nm (Optional extended range)
Thickness Range 5 nm ~ 250 μm — Single system coverage from nanometers to micrometers
Minimum Measurable Thickness ≥ 50 nm — Depends on material optical properties
Accuracy 2 nm or 0.2% (Whichever is greater) — Maintains precision across full range
Repeatability 0.1 nm — Sub-angstrom precision for ultra-thin films
Spot Size Down to 0.5 mm — Small feature measurement capability
Sample Size 50 mm to 300 mm or larger — Wafer to panel scale compatibility

Filmetrics F20 Replacement

Direct replacement for Filmetrics F20 film thickness measurement systems. Equivalent or superior specifications with broader spectral range options (up to 1700 nm), comparable accuracy (2 nm / 0.2%), and enhanced repeatability (0.1 nm). Compatible with existing F20 measurement recipes and protocols. Cost-effective solution for semiconductor, photovoltaic, and optical coating industries.

Precision Thickness Measurement

Configure a film thickness measurement system optimized for your application. Our applications team provides sample feasibility studies and method development support.

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Since 1993 30+ Years of Instrument Expertise
Reliable Manufacturer Manufacturing & Services
Ph.D. Founded Dr. Pingxin Wang, UT Austin
Advantages Price · Service · Speed · Technical · Data
Fast Shipping In-Stock Orders Ship Same Day

Frequently Asked Questions

How can I contact you?

Feel free to call us T+86 189-6516-4839
or email  sales@nwspec.com to:

• Place an order
• Ask for a quote
• Or if you have any other questions

You will always get a live person here at NWSPEC; never an automated system! 

We are open from 6:00AM - 7:00PM Eastern Time, Monday - Friday. 

Where can I find application notes?

If you have any questions regarding the application notes, or can't find the one you are looking for, please contact Sales at sales@nwspec.com



Do you have instructional manuals for your instruments to download?

Yes, we have instructional manuals for our instruments. They can be found on https://nwspec.com/pages/resource .

If you don't see the one you are looking for, please contact: sales@nwspec.com



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